The fluorine isgenerated by medium temperature method in this system, equation is as follows:
Remove foreign matter from unrefined fluorine obtained bypurification, and then filter it and compress it to store in a basin, andfinally mixed with inert gases and transfer to device for using.
System canprovide pure fluorine to user (Purity≥99%), or mixed gasmade by fluorine and other inert gases with concentration required by user,such as fluorine-nitrogen mixed gas e.g. 5%, 10%, 20% etc., the capacity of thesystem can be designed according to dosage needed by user.
System can be assembled as aall-in-one machine, or arranged and placed according to users’ requirement;
Equipped with device interfacethat can exchange electrolytic cell etc., which made the maintenance notinfluence gas supply;
Equippedwith on site air purification device, even when maintenance or exchange of device, it can protect the environment of theproduction field.